Enhancement of UV photoluminescence in ZnO tubes grown by metal organic chemical vapour deposition (MOCVD)

被引:29
|
作者
Iwan, S. [1 ]
Zhao, J. L. [2 ]
Tan, S. T. [3 ]
Sun, X. W. [4 ]
机构
[1] FMIPA Univ Negeri Jakarta, Program Studi Fisika, Jalan Rawamangun Muka, Jakarta Timur 13220, Indonesia
[2] NanoArc Technol Pte Ltd, Singapore 389730, Singapore
[3] Nanyang Technol Univ, Sch Elect & Elect Engn, Nanyang Ave, Singapore 639798, Singapore
[4] Southern Univ Sci & Technol, Dept Elect & Elect Engn, Shenzhen 518055, Guangdong, Peoples R China
关键词
ZnO tubes; MOCVD; Growth temperature; Reactor pressure; Zn-O ratio; OPTICAL-PROPERTIES; NANOTUBES; TEMPERATURE; FILMS; MECHANISM; ARRAYS;
D O I
10.1016/j.vacuum.2018.06.035
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have synthesized ZnO tubes, without any catalyst, on Al2O3 (001) substrates by metal organic chemical vapor deposition (MOCVD) at different growth temperatures, pressures and Zn-O ratios. The results confirm that the growth temperature, reactor pressure and Zn-O ratio play important roles in the formation of hexagonal ZnO tubes. Scanning electron microscopy (SEM) images indicated that, at a growth temperature of 500 degrees C, reactor pressure of 75 Torr and Zn-O ratio of 10/75 are an appropriate condition to obtain hexagonal and well-aligned ZnO tubes. High-resolution, double crystal XRD analysis shows a symmetric omega-scan rocking curve, with a full width at half maximum (FWHM) of 1.1 degrees. It confirms the ZnO tubes have highly c-axis orientation on Al2O3 substrate. Subsequently, room temperature photoluminescence (PL) studies confirm that the enhancement of UV emissions from ZnO tubes is due to increasing Zn-O ratios.
引用
收藏
页码:408 / 411
页数:4
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