Derivation of effective penetration depth of femtosecond laser pulses in metal from ablation rate dependence on laser fluence, incidence angle, and polarization

被引:33
作者
Miyasaka, Yasuhiro [1 ]
Hashida, Masaki
Nishii, Takaya
Inoue, Shunsuke
Sakabe, Shuji
机构
[1] Kyoto Univ, Inst Chem Res, Adv Res Ctr Beam Sci, Kyoto 6110011, Japan
关键词
PERIODIC STRUCTURES; NANOSTRUCTURES; THRESHOLDS;
D O I
10.1063/1.4905353
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ablation rate dependence on laser fluence for copper subjected to oblique femtosecond laser irradiation has been determined experimentally in order to investigate processing induced by oblique irradiation. A difference of ablation rate between p-polarized and s-polarized oblique irradiation is clearly observed. Effective penetration depth is defined to explain the ablation rate dependence instead of using optical penetration depth, which is treated as a key value for determining the ablation rate in conventional theory. The effective penetration depth for copper is presented in simple formulas as a function of laser incidence angle for each polarization. (C) 2015 AIP Publishing LLC.
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页数:5
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