Picosecond Time-Resolved LADA Integrated with a Solid Immersion Lens on a Laser Scanning Microscope

被引：0
|
作者：
Dickson, Kris [1 ]
Erington, Kent [1 ]
Bodoh, Dan [1 ]
Serrels, Keith [1 ]
Petri, Charles [1 ]
Ybarra, Juan [1 ]
Ly, Khiem [1 ]
机构：
[1] NXP Semicond, 6501 West William Cannon Dr, Austin, TX 78735 USA
来源：
ISTFA 2017: CONFERENCE PROCEEDINGS FROM THE 43RD INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2017年
关键词：
ASSISTED DEVICE ALTERATION;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.
引用
收藏
页码：228 / 237
页数：10
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