Picosecond Time-Resolved LADA Integrated with a Solid Immersion Lens on a Laser Scanning Microscope

被引：0
|
作者：
Dickson, Kris [1 ]
Erington, Kent [1 ]
Bodoh, Dan [1 ]
Serrels, Keith [1 ]
Petri, Charles [1 ]
Ybarra, Juan [1 ]
Ly, Khiem [1 ]
机构：
[1] NXP Semicond, 6501 West William Cannon Dr, Austin, TX 78735 USA
来源：
ISTFA 2017: CONFERENCE PROCEEDINGS FROM THE 43RD INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2017年
关键词：
ASSISTED DEVICE ALTERATION;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.
引用
收藏
页码：228 / 237
页数：10
相关论文
共 50 条
  • [11] A PICOSECOND LASER SOURCE FOR TIME-RESOLVED MEASUREMENTS ON THE BASIS OF AN EXCIMER LASER
    KUKK, PL
    FEKLISTOV, DS
    TAMKIVI, RP
    KVANTOVAYA ELEKTRONIKA, 1986, 13 (07): : 1518 - 1521
  • [12] System for time-resolved spectroscopy using a semiconductor picosecond laser
    Plucinski, J
    Wierzba, P
    Myllylä, R
    OPTOELECTRONIC AND ELCTRONIC SENSORS IV, 2001, 4516 : 21 - 25
  • [13] PICOSECOND TIME-RESOLVED LASER SPECTROMETER WITH EXPANDED DELAY RANGE
    JOHNSON, CK
    BOSTICK, JM
    MOUNTER, SA
    RATZLAFF, KL
    SCHLOEMER, DE
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (11): : 2375 - 2379
  • [14] Nanolocal time-resolved optical study using scanning probe microscope
    Lozovik, YE
    Klyuchnik, AV
    Merkulova, SP
    LASER SPECTROSCOPY AND OPTICAL DIAGNOSTICS: NOVEL TRENDS AND APPLICATIONS IN LASER CHEMISTRY, BIOPHYSICS, AND BIOMEDICINE - ICONO'98, 1999, 3732 : 93 - 100
  • [15] Time-resolved single molecule photochemistry with a femtosecond scanning tunneling microscope
    Li, Shaowei
    Chen, Siyu
    Wang, Likun
    Wang, Hui
    Li, Jie
    Wu, Ruqian
    Ho, Wilson
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2018, 256
  • [16] A TIME-RESOLVED FLUORESCENCE MICROSCOPE
    FRENCH, T
    SO, P
    BERLAND, K
    GRATTON, E
    BIOPHYSICAL JOURNAL, 1993, 64 (02) : A110 - A110
  • [17] In situ investigation of degradation in polymeric electroluminescent devices using time-resolved confocal laser scanning microscope
    Do, LM
    Kim, KJ
    Zyung, T
    Shim, HK
    Kim, JJ
    APPLIED PHYSICS LETTERS, 1997, 70 (25) : 3470 - 3472
  • [18] TIME-RESOLVED INVESTIGATIONS OF N-MOS DEVICES BY CAPACITIVE COUPLING IN A LASER-SCANNING MICROSCOPE
    HEMPEL, K
    BERGNER, H
    MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) : 401 - 408
  • [19] TIME-RESOLVED BACKSIDE OPTICAL PROBING OF PICOSECOND-LASER-PULSE-PRODUCED PLASMA IN SOLID MATERIALS
    VU, BTV
    LANDEN, OL
    SZOKE, A
    PHYSICAL REVIEW E, 1993, 47 (04) : 2768 - 2777
  • [20] A complete and computationally efficient numerical model of aplanatic solid immersion lens scanning microscope
    Chen, Rui
    Agarwal, Krishna
    Sheppard, Colin J. R.
    Phang, Jacob C. H.
    Chen, Xudong
    OPTICS EXPRESS, 2013, 21 (12): : 14316 - 14330
12345