Picosecond Time-Resolved LADA Integrated with a Solid Immersion Lens on a Laser Scanning Microscope

被引：0

作者：

Dickson, Kris ^{[1
]}

Erington, Kent ^{[1
]}

Bodoh, Dan ^{[1
]}

Serrels, Keith ^{[1
]}

Petri, Charles ^{[1
]}

Ybarra, Juan ^{[1
]}

Ly, Khiem ^{[1
]}

机构：

[1] NXP Semicond, 6501 West William Cannon Dr, Austin, TX 78735 USA

来源：

ISTFA 2017: CONFERENCE PROCEEDINGS FROM THE 43RD INTERNATIONAL SYMPOSIUM FOR TESTING AND FAILURE ANALYSIS | 2017年

关键词：

ASSISTED DEVICE ALTERATION;

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.

引用

页码：228 / 237

页数：10