Depth of formation of a reflected soft x-ray beam under conditions of specular reflection

被引:13
|
作者
Filatova, EO [1 ]
Shulakov, AS [1 ]
Luk'yanov, VA [1 ]
机构
[1] St Petersburg State Univ, Inst Phys, St Petersburg 198904, Russia
基金
俄罗斯基础研究基金会;
关键词
Radiation; Spectroscopy; Reflection; Dioxide; State Physics;
D O I
10.1134/1.1130529
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Over a wide range of glancing-incidence angles, bremsstrahlung from an x-ray tube was used to measure the reflection spectra of an Si-SiO2 system with different dioxide thickness near the Si L-2,L-3 ionization threshold. The angular dependence of the depth of formation of the reflected soft x-ray beam was determined experimentally and compared with that obtained from a theoretical analysis of the interaction between electromagnetic radiation and the surface of an isotropic solid. (C) 1998 American Institute of Physics.
引用
收藏
页码:1237 / 1240
页数:4
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