Effect of levitation forces on the performance of surface micromachined MEMS gyroscopes

被引：10

作者：

Painter, C ^{[1
]}

Shkel, A ^{[1
]}

机构：

[1] Univ Calif Irvine, Microsyst Lab, Irvine, CA 92717 USA

来源：

PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3 | 2004年

关键词：

gyroscope; levitation; scale factor; cross axis sensitivity;

D O I：

10.1109/ICSENS.2004.1426212

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper, we study the effect of electrostatic levitation forces on the performance of a MEMS surface micromachined gyroscope. An error model relating the effects of the induced levitation deflections to scale factor and cross axis sensitivity is presented. Simulation and experimental results on a surface micromachined test structure are used to identify deflection versus voltage characteristics. These characteristics are scaled based off typical gyroscope parameters and the findings are that levitation forces can cause more than 50% reduction in scale factor and more than 1% increase in undesirable cross-axis sensitivity.

引用

页码：508 / 511

页数：4