The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF

被引：7
|
作者：
Xue, Chaofan [1 ]
Meng, Xiangyu [1 ,2 ]
Wu, Yanqing [1 ]
Wang, Yong [1 ]
Wang, Liansheng [1 ]
Yang, Shumin [1 ]
Zhao, Jun [1 ]
Tai, Renzhong [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Beijing 100049, Peoples R China
来源：
JOURNAL OF SYNCHROTRON RADIATION | 2018年 / 25卷
基金：
中国国家自然科学基金; 国家重点研发计划;
关键词：
synchrotron radiation; soft X-ray interference lithography beamline; spatial coherence; wave optics; mutual optical intensity; INTERFEROMETRIC LITHOGRAPHY; FABRICATION; PERFORMANCE; BAND;
D O I：
10.1107/S1600577518012833
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new spatially coherent beamline has been designed and constructed at the Shanghai Synchrotron Radiation Facility. Here, the design of the beamline is introduced and the spatial coherence is analyzed throughout the whole process by wave optics. The simulation results show good spatial coherence at the endstation and have been proven by experiment results.
引用
收藏
页码：1869 / 1876
页数：8
相关论文
共 50 条
  • [1] Developments at SSRF in soft X-ray interference lithography
    Yang Shu-Min
    Wang Lian-Sheng
    Zhao Jun
    Xue Chao-Fan
    Liu Hai-Gang
    Xu Zi-Jian
    Wu Yan-Qing
    Tai Ren-Zhong
    NUCLEAR SCIENCE AND TECHNIQUES, 2015, 26 (01) : 5 - 11
  • [2] Analysis of partially coherent light propagation through the soft X-ray interference lithography beamline at SSRF
    Meng, Xiangyu
    Yu, Huaina
    Wang, Yong
    Ren, Junchao
    Xue, Chaofan
    Yang, Shuimin
    Guo, Zhi
    Zhao, Jun
    Wu, Yanqing
    Tai, Renzhong
    JOURNAL OF SYNCHROTRON RADIATION, 2021, 28 : 902 - 909
  • [3] Introduction of the X-ray diffraction beamline of SSRF
    Yang Tie-Ying
    Wen Wen
    Yin Guang-Zhi
    Li Xiao-Long
    Gao Mei
    Gu Yue-Liang
    Li Li
    Liu Yi
    Lin He
    Zhang Xing-Min
    Zhao Bin
    Liu Ting-Kun
    Yang Ying-Guo
    Li Zhong
    Zhou Xing-Tai
    Gao Xing-Yu
    NUCLEAR SCIENCE AND TECHNIQUES, 2015, 26 (02)
  • [4] Introduction of the X-ray diffraction beamline of SSRF
    杨铁莹
    文闻
    阴广志
    李晓龙
    高梅
    顾月良
    李丽
    柳义
    林鹤
    张兴民
    赵滨
    刘亭坤
    杨迎国
    黎忠
    周兴泰
    高兴宇
    Nuclear Science and Techniques, 2015, 26 (02) : 5 - 9
  • [5] Design of the Soft X-ray Tomography Beamline at Taiwan Photon Source
    Su, Yi-Jr
    Fu, Huang-Wen
    Chung, Shih-Chun
    Fung, Hok-Sum
    Liu, Din-Goa
    Huang, Liang-Jen
    Yan, Hong-Yi
    Chou, Yu-Ching
    Yin, Gung-Chian
    Lai, Lee-Jene
    PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SYNCHROTRON RADIATION INSTRUMENTATION (SRI2015), 2016, 1741
  • [6] Hard X-ray micro-focusing beamline at SSRF
    张丽丽
    闫帅
    蒋升
    杨科
    王华
    何上明
    梁东旭
    张玲
    何燕
    兰旭颖
    毛成文
    王娟
    蒋晖
    郑怡
    董朝晖
    曾乐勇
    李爱国
    NuclearScienceandTechniques, 2015, 26 (06) : 3 - 10
  • [7] Hard X-ray micro-focusing beamline at SSRF
    Zhang Li-Li
    Yan Shuai
    Jiang Sheng
    Yang Ke
    Wang Hua
    He Shang-Ming
    Liang Dong-Xu
    Zhang Ling
    He Yan
    Lan Xu-Ying
    Mao Cheng-Wen
    Wang Juan
    Jiang Hui
    Zheng Yi
    Dong Zhao-Hui
    Zeng Le-Yong
    Li Ai-Guo
    NUCLEAR SCIENCE AND TECHNIQUES, 2015, 26 (06)
  • [8] Commissioning of Soft and Deep X-ray Lithography Beamline on Indus-2
    Dhamgaye, V. P.
    Sankar, B. Gowri
    Garg, C. K.
    Lodha, G. S.
    SOLID STATE PHYSICS, PTS 1 AND 2, 2012, 1447 : 527 - 528
  • [9] First X-ray fluorescence CT experimental results at the SSRF X-ray imaging beamline
    Deng Biao
    Yang Qun
    Xie Hong-Lan
    Du Guo-Hao
    Xiao Ti-Qiao
    CHINESE PHYSICS C, 2011, 35 (04) : 402 - 404
  • [10] Optical design of the Short Pulse Soft X-ray Spectroscopy beamline at the Advanced Photon Source
    Reininger, R.
    Keavney, D. J.
    Borland, M.
    Young, L.
    JOURNAL OF SYNCHROTRON RADIATION, 2013, 20 : 654 - 659
12345