Use of a high-frequency magnetron discharge for the utilization of chlorinated gases

被引：0

作者：

Vetoshkin, VM ^{[1
]}

Danilov, AA ^{[1
]}

Krylov, PN ^{[1
]}

机构：

[1] Udmurt State Univ, Izhevsk 426034, Russia

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2003年 / 46卷 / 04期

关键词：

Copper; Aluminum; Physical Chemistry; Chlorinate; Solid State;

D O I：

10.1023/A:1025154720536

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The possibility of applying a high-frequency magnetron discharge for the utilization of a chlorinated gas used for the reactive-ion etching of copper and aluminum is discussed. It is shown that a high-frequency magnetron discharge can be used for binding reactive-gas components and transforming them from the gas to the solid state. The dependence of the utilization efficiency on the high-frequency power, the magnetic-field strength, and the target material is studied.

引用

页码：554 / 557

页数：4

共 50 条

[1] Use of a High-Frequency Magnetron Discharge for the Utilization of Chlorinated Gases
V. M. Vetoshkin
A. A. Danilov
P. N. Krylov
Instruments and Experimental Techniques, 2003, 46 : 554 - 557
[2] High-frequency electric discharge in gases
Wilson, JC
NATURE, 1933, 131 : 546 - 547
[3] ELECTRODELESS HIGH-FREQUENCY PULSED DISCHARGE IN INERT GASES
ANDREEV, SI
BAIKOV, OG
DASHUK, PN
SERGEENK.EA
YARYSHEV.MD
SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1969, 14 (06): : 769 - &
[4] PLASMA STRATIFICATION OF THE TRANSVERSE HIGH-FREQUENCY DISCHARGE IN INERT-GASES
ABRAMOV, VP
KLENOV, SL
RADIOTEKHNIKA I ELEKTRONIKA, 1989, 34 (03): : 652 - 655
[5] SPECTROSCOPIC INVESTIGATIONS OF THE WEAK AND STRONG HIGH-FREQUENCY DISCHARGE IN INERT GASES
BOCHKOVA, OP
RAZUMOVSKAYA, LP
OPTIKA I SPEKTROSKOPIYA, 1964, 17 (01): : 16 - 23
[6] USE OF ELECTRODELESS HIGH-FREQUENCY DISCHARGE FOR LASER PUMPING
ANDREEV, SI
VANYUKOV, MP
EGOROVA, AA
SOKOLOV, BM
OPTICS AND SPECTROSCOPY-USSR, 1967, 23 (05): : 425 - &
[7] High frequency discharge in gases
Ionescu, TV
Mihul, I
COMPTES RENDUS HEBDOMADAIRES DES SEANCES DE L ACADEMIE DES SCIENCES, 1933, 196 : 1292 - 1294
[8] HIGH-FREQUENCY DISCHARGES IN GASES
BRIGHT, AW
NATURE, 1950, 165 (4203) : 811 - 812
[9] Characteristics of a high-frequency barrier discharge in mixtures of mercury diiodide vapor with gases
N. N. Guivan
A. N. Malinin
Optics and Spectroscopy, 2006, 101 : 375 - 383
[10] Formation of monochlorides of heavy inert gases in a high-frequency transverse discharge plasma
Shuaibov, A. K.
Shevera, I. V.
OPTICS AND SPECTROSCOPY, 2008, 104 (04) : 534 - 539

← 1 2 3 4 5 →