Controlled morphology of aluminum alloy nanopillar films: from nanohorns to nanoplates

被引：4

作者：

Fujii, Takashi ^{[1
]}

Aoki, Yoshitaka ^{[1
]}

Fushimi, Koji ^{[1
]}

Makino, Takeshi ^{[2
]}

Ono, Shoji ^{[2
]}

Habazaki, Hiroki ^{[1
]}

机构：

[1] Hokkaido Univ, Div Mat Chem, Fac Engn, Kita Ku, Sapporo, Hokkaido 0608628, Japan

[2] Nippon Chem Con Corp, Arakawa, Takahagi 3188505, Japan

来源：

NANOTECHNOLOGY | 2010年 / 21卷 / 39期

基金：

日本学术振兴会;

关键词：

GLANCING ANGLE DEPOSITION; SCULPTURED THIN-FILMS; COMPOSITE OXIDE-FILMS; ANODIC ALUMINA; TA NANOPILLARS; GROWTH; SOL; FABRICATION; PILLARS; ARRAYS;

D O I：

10.1088/0957-4484/21/39/395302

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Nanopillar films of Al-Nb alloys have been fabricated on substrates with a regular concave cell structure by oblique angle physical vapor deposition. The concave cell structure of the substrate increases the shadow region for the flux of depositing atoms, assisting the formation of an isolated nanopillar on each cell. Depending upon the alloy composition and deposition angle, the pillar shape changes from horn-like nanopillars through triangular nanoprisms to nanoplates. The Al-Nb alloy nanoplate films with wide gaps between plates are of interest as electrodes for capacitor applications. The dielectric oxide film formed on the nanoplate film showed a capacitance more than ten times larger than that on the respective flat film, due to the enlarged surface area.

引用

页数：9

共 33 条

[1] Investigation of substrate rotation at glancing-incidence on thin-film morphology [J].

Dick, B ;

Brett, MJ ;

Smy, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06) :2569-2575

[2] Controlled growth of periodic pillars by glancing angle deposition [J].

Dick, B ;

Brett, MJ ;

Smy, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (01) :23-28

[3]

Ebihara K., 1983, J. Met. Finish. Soc. Jpn, V34, P548, DOI DOI 10.4139/SFJ1950.34.548

[4] Inter-relationships between ionic transport and composition in amorphous anodic oxides [J].

Habazaki, H ;

Shimizu, K ;

Skeldon, P ;

Thompson, GE ;

Wood, GC .

PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1997, 453 (1963) :1593-1609

[5] Formation of amorphous anodic oxide films of controlled composition on aluminium alloys [J].

Habazaki, H ;

Shimizu, K ;

Skeldon, P ;

Thompson, GE ;

Wood, GC .

THIN SOLID FILMS, 1997, 300 (1-2) :131-137

[6] Anodizing of multilayer alloy films formed by sputter-deposition of valve metals [J].

Habazaki, H ;

Skeldon, P ;

Thompson, GE ;

Wood, GC ;

Shimizu, K .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1996, 73 (02) :297-308

[7] Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films [J].

Hawkeye, Matthew M. ;

Brett, Michael J. .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (05) :1317-1335

[8] The apparent constant-phase-element behavior of a disk electrode with faradaic reactions -: A global and local impedance analysis [J].

Huang, Vicky Mei-Wen ;

Vivier, Vincent ;

Orazem, Mark E. ;

Pebere, Nadine ;

Tribollet, Bernard .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (02) :C99-C107

[9] Fabrication of tetragonal square spiral photonic crystals [J].

Kennedy, SR ;

Brett, MJ ;

Toader, O ;

John, S .

NANO LETTERS, 2002, 2 (01) :59-62

[10] Nb2O5 deposition on aluminum from NbCl5-used sol and anodizing of Nb2O5-coated Al [J].

Koyama, Shun ;

Kikuchi, Tatsuya ;

Sakairi, Masatoshi ;

Takahashi, Hideaki ;

Nagata, Shinji .

ELECTROCHEMISTRY, 2007, 75 (08) :573-575

← 1 2 3 4 →