The laser ablation model development of glass substrate cutting assisted with the thermal fracture and ultrasonic mechanisms

被引:11
作者
Huang, Kuo-Cheng [1 ]
Hsiao, Wen-Tse [1 ]
Hwang, Chi-Hung [1 ]
Lin, Ru-Li [2 ]
Yeh, Jer-Liang Andrew [1 ,3 ]
机构
[1] Natl Appl Res Labs, Instrument Technol Res Ctr, Hsinchu 30076, Taiwan
[2] Southern Taiwan Univ, Dept Mech Engn, Tainan 71005, Taiwan
[3] Natl Tsing Hua Univ, Inst Nanoengn & MicroSyst, Hsinchu 30013, Taiwan
关键词
Thermal fracture cutting technology (TFCT); Glass substrate; Laser ablation; Ultrasonic-assisted; SEPARATION;
D O I
10.1016/j.optlaseng.2014.11.005
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
This study presents three hybrid processing models for cutting a glass substrate, and compares their cutting speeds. The three models are (I) thermal fracture cutting technology (TFCT)-assisted laser ablation, (II) ultrasonic-assisted laser ablation, and (III) ultrasonic and TFCT-assisted laser ablation. In the experiment, a 12 W 355 nm Nd:YVO4 laser system, a 40 W CO2 laser and an ultrasonic transducer were used to cut 3 mm thick soda-lime glasses. Lasers and ultrasonic transducers were used as heat sources and vibration sources, respectively. Results show that the surface morphology of the soda-lime glass sheet depends on the processing models. After cutting, the surface and cross-sectional morphology of glass substrate were observed using a portable digital microscope and residual stresses were also evaluated thanks to a photoelasticity instrument. (C) 2014 Elsevier Ltd. All rights reserved.
引用
收藏
页码:31 / 35
页数:5
相关论文
共 18 条
[1]  
BUECKNER HF, 1970, Z ANGEW MATH MECH, V50, P529
[2]  
Cheng YC, 2006, Taiwan Patent, Patent No. 1298280
[3]   A Study on Thermal Fracture Processing Models Applied to Glass Substrate Cutting [J].
Huang, Kuo-Cheng ;
Hung, Min-Wei ;
Tseng, Shih-Feng ;
Hwang, Chi-Hung .
ADVANCES IN MATERIALS AND PROCESSING TECHNOLOGIES II, PTS 1 AND 2, 2011, 264-265 :1252-1257
[4]  
Huang MC, 2010, P ADV MAT PROC TECHN
[5]  
Huang MC, 2010, P 4 CIRP INT C HIGH
[6]  
Izawa Y, 2009, IEEJ T SENS MICROMAC, V129, P63
[7]   CYCLIC FATIGUE IN CERAMICS - A BALANCE BETWEEN CRACK SHIELDING ACCUMULATION AND DEGRADATION [J].
JACOBS, DS ;
CHEN, IW .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1995, 78 (03) :513-520
[8]   Cutting glass substrates with dual-laser beams [J].
Jiao, Junke ;
Wang, Xinbing .
OPTICS AND LASERS IN ENGINEERING, 2009, 47 (7-8) :860-864
[9]  
Kondratenko V. S., 1997, U.S. patent, Patent No. [5,609,284, 5609284]
[10]   Laser cleaving on glass sheets with multiple laser beams [J].
Kuo, Yen-Liang ;
Lin, Jehnming .
OPTICS AND LASERS IN ENGINEERING, 2008, 46 (05) :388-395