Phase composition of nanosized oxide film structures based on lanthanum and scandium doped HfO2

X-ray photoelectron spectroscopy, X-ray diffraction, and high-resolution transmission electron microscopy (over thickness profiling of the elemental and phase compositions of the samples) are used to investigate the elemental and phase compositions, structures, and microstructures of films synthesized in La-Hf-O and Sc-Hf-O systems from organometallic volatile compounds. The dependence of the phase compositions and microstructures of films on the concentration of a doping rare earth element is determined. It is found that lanthanum and scandium doping of hafnium oxide results in the formation of solid solutions of a hightemperature cubic modification. The conditions for obtaining the pyrochlore phase are determined in the nanocrystalline Hf-La-O system.