Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity

被引：30
作者：
Ghafoor, Naureen [1 ]
Eriksson, Fredrik [1 ]
Gullikson, Eric [2 ]
Hultman, Lars [1 ]
Birch, Jens [1 ]
机构：
[1] Linkoping Univ, IFM, Dept Phys Chem & Biol, SE-58183 Linkoping, Sweden
[2] Lawrence Berkeley Lab, Berkeley, CA 94720 USA
来源：
APPLIED PHYSICS LETTERS | 2008年 / 92卷 / 09期
关键词：
D O I：
10.1063/1.2857459
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Soft x-ray reflectivity (SXR) of Cr/Sc multilayer with bilayer thickness of Lambda=1.56 nm was increased by 100% by an intentional introduction of nitrogen during magnetron sputtering. Multilayers deposited at background pressures of <= 2x10(-6) Torr exhibited amorphous layers with flat interfaces. At 2x10(-5) Torr, understoichiometric CrNx/ScNy multilayer with a nitrogen content of similar to 34 at. % was formed. CrNx/ScNy multilayer comprising of only 100 periods exhibited a SXR of 11.5%. X-ray and electron microscopy analyses showed that the improvement in performance is a result of reduced interfacial diffusion yielding interface widths of <= 0.29 nm. The CrNx/ScNy multilayer exhibited thermal stability up to >380 degrees C. (C) 2008 American Institute of Physics.
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