From 1D to 3D: Tunable Sub-10 nm Gaps in Large Area Devices

被引:55
|
作者
Zhou, Ziwei [1 ]
Zhao, Zhiyuan [1 ,2 ,3 ]
Yu, Ye [1 ,4 ]
Ai, Bin [1 ]
Moehwald, Helmuth [5 ]
Chiechi, Ryan C. [2 ,3 ]
Yang, Joel K. W. [4 ]
Zhang, Gang [1 ]
机构
[1] Jilin Univ, Coll Chem, State Key Lab Supramol Struct & Mat, Changchun 130012, Peoples R China
[2] Univ Groningen, Stratingh Inst Chem, Nijenborgh 4, NL-9747 AG Groningen, Netherlands
[3] Univ Groningen, Zernike Inst Adv Mat, Nijenborgh 4, NL-9747 AG Groningen, Netherlands
[4] Singapore Univ Technol & Design, Engn Prod Dev, 8 Somapah Rd, Singapore 487372, Singapore
[5] Max Planck Inst Colloids & Interfaces, D-14424 Potsdam, Germany
基金
中国国家自然科学基金;
关键词
3D nanostructures; nanogaps; nanoskiving; surface-enhanced Raman spectroscopy; surface plasmon; SURFACE-PLASMON RESONANCES; NANOSTRUCTURES; NANOWIRES; ARRAYS; LITHOGRAPHY; FABRICATION; GENERATION; NANOGAPS; CHAINS; SERS;
D O I
10.1002/adma.201505929
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Tunable sub-10 nm 1D nanogaps are fabricated based on nanoskiving. The electric field in different sized nanogaps is investigated theoretically and experimentally, yielding nonmonotonic dependence and an optimized gap-width (5 nm). 2D nanogap arrays are fabricated to pack denser gaps combining surface patterning techniques. Innovatively, 3D multistory nanogaps are built via a stacking procedure, processing higher integration, and much improved electric field. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:2956 / 2963
页数:8
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