Structural Features and Mutual Influence of the Layers in PZT-LNO-SiOx-Si and PZT-LNO-Si Compositions

被引：2
|
作者：
Zhigalina, O. M. [1 ,2 ]
Atanova, A. V. [1 ]
Khmelenin, D. N. [1 ]
Kotova, N. M. [3 ]
Seregin, D. S. [3 ]
Vorotilov, K. A. [3 ]
机构：
[1] Russian Acad Sci, Shubnikov Inst Crystallog, Fed Sci Res Ctr Crystallog & Photon, Moscow 119333, Russia
[2] Bauman Moscow State Tech Univ, Moscow 105005, Russia
[3] Russian Technol Univ MIREA, Moscow 119454, Russia
来源：
CRYSTALLOGRAPHY REPORTS | 2019年 / 64卷 / 06期
关键词：
LEAD-ZIRCONATE-TITANATE; LANIO3;
D O I：
10.1134/S1063774519060282
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The phase composition and specific features of the microstructures of layers in the Pb(Zr0.52Ti0.48)O-3-LaNiO3-Si and Pb(Zr0.52Ti0.48)O-3-LaNiO3-SiOx-Si compositions grown by chemical vapor deposition from solutions have been investigated by high-resolution transmission electron microscopy, electron diffraction, and energy-dispersive analysis. The influence of the structure of the lower LaNiO3 electrode on the structure and properties of ferroelectric lead zirconate titanate films with a perovskite structure is studied. It is shown that the misoriented porous polycrystalline structure of the lower electrode leads to violation of the columnarity of perovskite grains. The electrical parameters are slightly deteriorated in comparison with a conventional platinum electrode. The structures of the thin films with a silicate sublayer under the LaNiO3 electrode and without it are compared.
引用
收藏
页码：961 / 967
页数：7
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