Preparation of oxide buffers on a cube-textured Ni substrate for coated conductor by CVD

被引:2
作者
Lee, HG
Lee, YM
Hong, GW
机构
[1] Korea Atom Energy Res Inst, Funct Mat Lab, Yusung Gu, Taejon 305600, South Korea
[2] Chonbuk Natl Univ, Jeonju, South Korea
关键词
CVD; CeO2; NiO; thin film;
D O I
10.1109/77.919776
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
NiO films have been grown by metal-organic chemical vapor deposition(MOCVD) on a cube-textured Ni substrate. At a lower deposition temperature of 400 degreesC, an amorphous film was formed. Deposited CeO2 film showed a mixed texture of (100)< 001 > and (100)< 011 > orientations. Depending on the deposition condition, the transition from (100)< 001 > texture to (100)< 011 > orientation was observed for the CeO2 film. The NiO film was deposited at 470 degreesC for 10min, Deposition pressure was 10 Torr and the oxygen partial pressure was 0.91 Torr, X-ray reeking curve and phi -scan showed that the NiO film has a bi-axial texture with a (100)< 001> orientation. The out-of-plane and the in-plane deviation were measured as 4.2 degrees and 6 similar to7 degrees from the FWHM of (200) and (111) planes, respectively.
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收藏
页码:3333 / 3336
页数:4
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