Micromechanical scanning mirrors with highly reflective NIR coatings for high power applications

被引：3

作者：

Sandner, T ^{[1
]}

Schmidt, JU ^{[1
]}

Schenk, H ^{[1
]}

Lakner, H ^{[1
]}

Braun, S ^{[1
]}

Foltyn, T ^{[1
]}

Leson, A ^{[1
]}

Gatto, A ^{[1
]}

Yang, M ^{[1
]}

Kaiser, N ^{[1
]}

机构：

[1] Fraunhofer Inst Photon Microsyst, D-01099 Dresden, Germany

来源：

MOEMS DISPLAY AND IMAGING SYSTEMS III | 2005年 / 5721卷

关键词：

MOEMS; Micro Scanning Mirror; NIR; highly reflective mirror coatings; high optical power density;

D O I：

10.1117/12.590448

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper addresses different highly reflective optical coatings on micro scanning mirrors (MSM) for applications in the NIR-spectral region to enable new applications like laser marking and material treatment at high optical power density. In the case of MSM with an unprotected Al coating, the absorption limits the maximal power density because of induced heating. The damage threshold for unprotected Al coatings was investigated. In addition highly reflective enhanced metallic and dielectric multilayer coatings for the NIR have been developed and characterized. These coatings resolve the problems of unprotected aluminum coatings related to NIR absorption and the resulting limitation of applicable laser power density. The coatings ensure a high reflectance even in corrosive environments. Enhanced metallic broadband reflectors reach a reflectivity of 98.7% at 1064nm whereas narrow-band dielectric multilayer coatings reach a reflectivity of 99.7% at 1064nm.

引用

页码：34 / 42

页数：9

共 8 条

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