Thermal Stability of CrAlN Coatings

被引：2

作者：

Zhu Ming ^{[1
]}

Li Meishuan ^{[2
]}

机构：

[1] Xian Univ Sci & Technol, Coll Mat Sci & Engn, Xian 710054, Peoples R China

[2] Chinese Acad Sci, Inst Metal Res, Shenyang 110016, Peoples R China

来源：

TESTING AND EVALUATION OF INORGANIC MATERIALS I | 2011年 / 177卷

基金：

美国国家科学基金会;

关键词：

Cr-Al-N coatings; Thermal stability; Magnetron sputtering; OXIDATION RESISTANCE; FILMS; WEAR; MECHANISMS; STEEL; TOOLS; TIN;

D O I：

10.4028/www.scientific.net/AMR.177.249

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Cr-Al-N coatings were deposited on the surface of the (111) single silicon for the aim to study the thermal stability of this kind of coating. The microstructure and composition of the coatings were identified by XRD and SEM/EDS, respectively. The changes of the microstructure of the coatings after being annealing in the hydrogen under 900-1100 degrees C were also studied by XRD analysis. The results showed that: the as-deposited coatings performed B1 microstructure with (111) preferred orientation; the microstructure of the Cr-Al-N coatings would transformed from CrN to Cr2N during the increasing of temperature and the transformation temperature increased with increasing aluminum content of the coating; AlN would also precipitate from the Cr-Al-N coating and the precipitation temperature decreased with increasing aluminum content of the coating.

引用

页码：249 / +

页数：2

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