Wafer-scale synthesis of graphene by chemical vapor deposition and its application in hydrogen sensing

被引：236
作者：
Wu, Wei [1 ,2 ]
Liu, Zhihong [2 ]
Jauregui, Luis A. [3 ,4 ]
Yu, Qingkai [1 ,2 ]
Pillai, Rajeev [1 ]
Cao, Helin [3 ,5 ]
Bao, Jiming [2 ]
Chen, Yong P. [3 ,4 ,5 ]
Pei, Shin-Shem [1 ,2 ]
机构：
[1] Univ Houston, Ctr Adv Mat, Houston, TX 77204 USA
[2] Univ Houston, Dept Elect & Comp Engn, Houston, TX 77204 USA
[3] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[4] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[5] Purdue Univ, Dept Phys, W Lafayette, IN 47907 USA
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2010年 / 150卷 / 01期
基金：
美国国家科学基金会;
关键词：
Graphene; Chemical vapor deposition; Gas sensor; WALLED CARBON NANOTUBES; FEW-LAYER GRAPHENE; LARGE-AREA; SINGLE; NANOPARTICLES; PERFORMANCE; FILMS; GAS;
D O I：
10.1016/j.snb.2010.06.070
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Graphene with a large area was synthesized on Cu foils by chemical vapor deposition under ambient pressure A 4 '' x 4 '' graphene film was transferred onto a 6 '' Si wafer with a thermally grown oxide film Raman mapping indicates monolayer graphene dominates the transferred graphene film Gas sensors were fabricated on a 4 mm x 3 mm size graphene film with a 1 nm palladium film deposited for hydrogen detection Hydrogen in air with concentrations in 00025-1% (25-10,000 ppm) was used to test graphene-based gas sensors The gas sensors based on palladium-decorated graphene films show high sensitivity, fast response and recovery, and can be used with multiple cycles The mechanism of hydrogen detection is also discussed (C) 2010 Elsevier B V All rights reserved
引用
收藏
页码：296 / 300
页数：5
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