RF micromachined varactors with wide tuning range

被引：6
|
作者：
Dec, A [1 ]
Suyama, K [1 ]
机构：
[1] Columbia Univ, Dept Elect Engn, New York, NY 10027 USA
来源：
1998 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM | 1998年
关键词：
D O I：
10.1109/RFIC.1998.682340
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Polysilicon surface micromachined varactors using two- and three-plate structures with 1.5:1 and 1.87:1 tuning ranges, respectively, are presented. The tuning ranges are near-theoretical limits and can be obtained within 4.4 V control voltage. The two-plate varactor has a nominal capacitance of 2.05 pF and a Q-factor of 20 at 1 GHz.
引用
收藏
页码：309 / 312
页数：4
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