Novel results of laser precision microfabrication with excimer lasers and solid-state lasers

被引：2

作者：

Stamm, U ^{[1
]}

Fiebig, M ^{[1
]}

Govorkov, S ^{[1
]}

Mayer, E ^{[1
]}

Osmanov, R ^{[1
]}

Scaggs, M ^{[1
]}

Slobodchikov, E ^{[1
]}

Wiessner, A ^{[1
]}

Basting, D ^{[1
]}

机构：

[1] Lambda Phys AG, D-37079 Gottingen, Germany

来源：

1ST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2000年 / 4088卷

关键词：

excimer laser; diode-pumped solid-state UV laser; 157 nm laser; F-2; laser; TFT annealing; micromachining; microdrilling;

D O I：

10.1117/12.405697

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Over the last decades laser technology has found the way into various industries. For microfabrication specifically excimer lasers have developed to powerful manufacturing tools because of their short UV wavelengths as well as the progress in excimer laser technology. More recently the development of pulsed medium-power diode-pumped solid-state lasers has opened the way to new micromachining applications related to the available superior beam quality. Here we review technological achievements in both industrialized excimer lasers and diode-pumped Nd:YAG lasers for microfabrication. Data are presented for industrial 308 nm excimer lasers with energy stability better than 1 % (sigma) at 300 W average power. Using the latest technology in 157 nm excimer lasers applications of processing of "difficult" materials are presented. Finally we review results on studies of microdrilling of metals and ceramics using a newly developed 10 kHz diode-pumped solid-state laser at wavelengths 1064 nm, 532 nm and 355 nm.

引用

页码：118 / 123

页数：6