Vertically coupled microring resonators using polymer wafer bonding

被引:60
作者
Absil, PP [1 ]
Hryniewicz, JV
Little, BE
Johnson, FG
Ritter, KJ
Ho, PT
机构
[1] Lab Phys Sci, College Pk, MD 20740 USA
[2] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
关键词
microresonator; wavelength filter; WDM;
D O I
10.1109/68.903217
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new technique is presented to make vertically coupled semiconductor microring resonators that eases the fabrication process with devices more robust to ring-to-waveguide misalignments, Single-mode microring optical channel dropping filters are demonstrated for the first time in this configuration with es greater than 3000 and an on-resonance channel extinction greater than 12 dB, A 1 x 4 multipiexer/demultiplexer crossbar array with second-order microrings was also made and exhibited channel-to-channel crosstalk lower than 10 dB.
引用
收藏
页码:49 / 51
页数:3
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