Damp Heat Stability of ZnO:Ga Thin Films on Glass Substrate

被引：3

作者：

Kang, Jong-Ho ^{[1
,2
]}

Kim, Dae Wook ^{[1
,2
]}

Lee, Myung-Hyun ^{[1
]}

Lim, Young Soo ^{[1
]}

Seo, Won-Seon ^{[1
]}

Choi, Heon-Jin ^{[2
]}

Bang, Jung-Sik ^{[3
]}

Jang, Hyun-Woo ^{[3
]}

Lee, Deuk Yong ^{[4
]}

机构：

[1] Korea Inst Ceram Engn & Technol, Green Ceram Div, Seoul 153801, South Korea

[2] Yonsei Univ, Dept Mat Sci & Engn, Seoul 120749, South Korea

[3] LG Chem Ltd, Taejon 305380, South Korea

[4] Daelim Univ Coll, Anyang 431715, South Korea

来源：

JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2010年 / 57卷 / 04期

关键词：

TCO; ZnO; Glass; Sputtering; Damp heat stability; GA-DOPED ZNO; OPTICAL-PROPERTIES; TEMPERATURE; AIR;

D O I：

10.3938/jkps.57.1081

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We investigated the damp heat stability of Ga-doped ZnO (GZO) thin films grown on glass substrates. GZO thin films with thicknesses of 150 nm were grown on glass substrates by rf-magnetron sputtering. After the deposition, a damp heat stability test was performed at various temperature (50 similar to 65 degrees C) and relative humidities (80 similar to 90%) for up to 240 hr. With increasing temperature and humidity, the sheet resistance of the GZO thin films increased to a maximum of 14.2% at 65 degrees C/90% RH. The changes of surface morphology caused by damp heat were drastic and were comparable to the degradation caused by high temperature only. The effect of damp heat is discussed based on the electrical and the structural characterizations.

引用

页码：1081 / 1085

页数：5

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