Zinc oxide thin films prepared by means of Langmuir-Blodgett multilayers

被引:14
|
作者
Seidl, M [1 ]
Schurr, M [1 ]
Brugger, A [1 ]
Volz, E [1 ]
Voit, H [1 ]
机构
[1] Univ Erlangen Nurnberg, Inst Phys, D-91058 Erlangen, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 68卷 / 01期
关键词
D O I
10.1007/s003390050857
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Continuous ultrathin ZnO films with a surface roughness less then 1 nm have been fabricated by means of an organic precursor consisting of a Zn-arachidate Langmuir-Blodgett film. The organic component was eliminated by means of UV irradiation of the precursor and subsequent heating. The remaining ZnO films are polycrystalline and highly transparent in the visible range. They exhibit a high electrical resistivity.
引用
收藏
页码:81 / 85
页数:5
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