Application of Love wave sensing with mesoporous thin film

被引：0

作者：

Tamarin, Ollivier ^{[1
,2
]}

Lachaud, Jean Luc ^{[2
]}

Hallil, Hamida ^{[2
,3
]}

Dejous, Corinne ^{[2
]}

Rebiere, Dominique ^{[2
]}

机构：

[1] Univ Guyane, UMR 228 Espace Dev, F-97300 Cayenne, France

[2] Univ Bordeaux, CNRS, Bordeaux INP, IMS,UMR 5218, F-33400 Talence, France

[3] CNRS NTU Thales, CINTRA, UMI 3288, Res Techno Plaza,50 Nanyang Dr, Singapore 637553, Singapore

来源：

2019 34TH SYMPOSIUM ON MICROELECTRONICS TECHNOLOGY AND DEVICES (SBMICRO 2019) | 2019年

关键词：

Love wave sensor; porous layer; high sensitivity; liquid and gas sensing; mechanical characterization; SENSORS; BIOSENSOR; DEVICE; MODEL;

D O I：

10.1109/sbmicro.2019.8919282

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Acoustic wave sensors are given special attention since a few decades as they offer a good sensitivity for detection applications. Their ability to operate in liquid and gas media make them a very interesting device. Nevertheless, to further improve their sensitivity in term of "mass loading effect", the increasing of the surface to volume ratio of the associated sensitive layer is a promising strategy which could overcome many of the challenges faced by the in situ detection of low mass biomolecules. This paper presents an overview of the latest works carried out on the association of Love wave transducers with SiO2 and TiO2 porous layers at the IMS Laboratory. The principal results are developed, and the current investigations and perspective are exposed.

引用

页数：4

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