Surface modification effects on film growth with atmospheric Ar/Ar+O2 plasma

被引：18

作者：

Chung, YM ^{[1
]}

Jung, MJ ^{[1
]}

Lee, MW ^{[1
]}

Han, JG ^{[1
]}

机构：

[1] Sungkyunkwan Univ, Ctr Adv Plasma Surface Technol, Suwon, South Korea

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 174卷

关键词：

atmospheric RF plasma; surface modification; PVC; interface; Ti film;

D O I：

10.1016/S0257-8972(03)00362-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Commercial, purified PVC films were surface-modified by Ar and mixed Ar + O-2 RF plasma at atmospheric pressure. The change of surface properties was monitored by contact angle measurements. Both modifications cause surface oxidation of PVC films, which is connected with the formation of functional groups enhancing polymer wettability. This process is very fast and efficient in mixed Ar + O-2 RF plasma but relatively slower during PVC exposure to Ar. The interface reactions of sputtered Ti with PVC have been studied using high resolution X-ray diffractometer and X-ray photoelectron spectroscopy. The reactions of Ti with PVC lead to the simultaneous formation of TiCL2, TiC and Ti-oxide. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：1038 / 1042

页数：5

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