ZnO;
Gas sensor;
TCO;
Doping;
Spray pyrolysis;
Discriminative analysis;
NO2 GAS SENSOR;
SENSING PROPERTIES;
NANOPARTICLES;
FABRICATION;
IN2O3;
ARRAY;
D O I:
10.1007/s00339-021-04771-8
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Aluminum-doped zinc oxide (AZO) thin films with different doping concentrations have been synthesized by simple spray pyrolysis technique. Precursor solution concentration was maintained similar to 50 mM throughout the fabrication process and dopant concentration was varied from 0 to 5 at. %. Prepared solution was sprayed on top of pre-heated glass plate to get highly adhesive AZO thin films. Various characterization techniques such as X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-Visible spectroscopy were adopted to get an insight into the material formation. Electrical and gas-sensing characteristics were also recorded in detail to evaluate its potential application as a transparent conductor and gas sensor. As determined from XRD analysis, continuous decrease in grain size was observed with increase in aluminum doping concentration. Further, extracting the interplanar distance and lattice parameters, it was noticed that there was a negligible random variation. Aluminum doping also plays a significant role in modifying the surface morphology of thin films. Randomly arranged plate-like structures in undoped ZnO thin films transform to granular morphology with aluminum doping. Minimum resistivity of 0.517 Omega m with similar to 80% transmittance in visible region was achieved at an optimal aluminum doping concentration of 3 at.%. Aluminum doping helps in increasing the sensitivity of ZnO thin films toward various volatile organic compound vapors such as acetone and ethanol. 3 at.% Al-doped thin films were capable of detecting 100 ppm of ethanol and acetone with a highest sensitivity of -similar to 60%. Al incorporation to ZnO lattice is also supportive in bringing down the response and recovery time of the sensing material. A very short response time of 3 s and recovery time of 28 s was achieved at 100 ppm of ethanol. Principal component analysis shows proper discrimination between acetone and ethanol. [GRAPHICS] .
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Lee, Chul-Soon
Li, Hua-Yao
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Li, Hua-Yao
Kim, Bo-Young
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Kim, Bo-Young
Jo, Young-Moo
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Jo, Young-Moo
Byun, Hyung-Gi
论文数: 0引用数: 0
h-index: 0
机构:
Kangwon Natl Univ, Div Elect Informat & Commun Engn, 346 Jungang Ro, Samcheok Si 25913, Gangwon Do, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Byun, Hyung-Gi
Hwang, In-Sung
论文数: 0引用数: 0
h-index: 0
机构:
LG Elect Mat & Prod Engn Res Inst, Magokjungang 10 Ro, Seoul 07796, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Hwang, In-Sung
Abdel-Hady, Faissal
论文数: 0引用数: 0
h-index: 0
机构:
King Abdulaziz Univ, Dept Chem & Mat Engn, Jeddah 21589, Saudi ArabiaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Abdel-Hady, Faissal
Wazzan, Abdulaziz A.
论文数: 0引用数: 0
h-index: 0
机构:
King Abdulaziz Univ, Dept Chem & Mat Engn, Jeddah 21589, Saudi ArabiaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Wazzan, Abdulaziz A.
Lee, Jong-Heun
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
King Abdulaziz Univ, Dept Chem & Mat Engn, Jeddah 21589, Saudi ArabiaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South Korea
KAUST, Elect Engn Program, Comp Elect & Math Sci, Thuwal 239556900, Saudi Arabia
KAUST, Engn Div, Thuwal 239556900, Saudi ArabiaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Majhi, Sanjit Manohar
Naik, Gautam Kumar
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Naik, Gautam Kumar
Lee, Hu-Jun
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Lee, Hu-Jun
Song, Ho-Geun
论文数: 0引用数: 0
h-index: 0
机构:
Ogam Technol, Jeonju 54882, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Song, Ho-Geun
Lee, Cheul-Ro
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Lee, Cheul-Ro
Lee, In-Hwan
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Lee, In-Hwan
Yu, Yeon-Tae
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
机构:
Univ Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, IranUniv Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, Iran
Nikfarjam, Alireza
Hosseini, Seyedsina
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, IranUniv Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, Iran
Hosseini, Seyedsina
Salehifar, Nahideh
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, IranUniv Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, Iran
机构:
Karmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, IndiaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Patil, Vithoba L.
Vanalakar, Sharadrao A.
论文数: 0引用数: 0
h-index: 0
机构:
Karmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Chonnam Natl Univ, Dept Mat Sci & Engn, Gwangju 500757, South KoreaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Vanalakar, Sharadrao A.
Patil, Pramod S.
论文数: 0引用数: 0
h-index: 0
机构:
Shivaji Univ, Dept Phys, Kolhapur 416009, Maharashtra, IndiaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Patil, Pramod S.
Kim, Jin H.
论文数: 0引用数: 0
h-index: 0
机构:
Chonnam Natl Univ, Dept Mat Sci & Engn, Gwangju 500757, South KoreaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Lee, Chul-Soon
Li, Hua-Yao
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Li, Hua-Yao
Kim, Bo-Young
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Kim, Bo-Young
Jo, Young-Moo
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Jo, Young-Moo
Byun, Hyung-Gi
论文数: 0引用数: 0
h-index: 0
机构:
Kangwon Natl Univ, Div Elect Informat & Commun Engn, 346 Jungang Ro, Samcheok Si 25913, Gangwon Do, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Byun, Hyung-Gi
Hwang, In-Sung
论文数: 0引用数: 0
h-index: 0
机构:
LG Elect Mat & Prod Engn Res Inst, Magokjungang 10 Ro, Seoul 07796, South KoreaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Hwang, In-Sung
Abdel-Hady, Faissal
论文数: 0引用数: 0
h-index: 0
机构:
King Abdulaziz Univ, Dept Chem & Mat Engn, Jeddah 21589, Saudi ArabiaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Abdel-Hady, Faissal
Wazzan, Abdulaziz A.
论文数: 0引用数: 0
h-index: 0
机构:
King Abdulaziz Univ, Dept Chem & Mat Engn, Jeddah 21589, Saudi ArabiaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
Wazzan, Abdulaziz A.
Lee, Jong-Heun
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
King Abdulaziz Univ, Dept Chem & Mat Engn, Jeddah 21589, Saudi ArabiaKorea Univ, Dept Mat Sci & Engn, Seoul 02841, South Korea
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South Korea
KAUST, Elect Engn Program, Comp Elect & Math Sci, Thuwal 239556900, Saudi Arabia
KAUST, Engn Div, Thuwal 239556900, Saudi ArabiaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Majhi, Sanjit Manohar
Naik, Gautam Kumar
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Naik, Gautam Kumar
Lee, Hu-Jun
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Lee, Hu-Jun
Song, Ho-Geun
论文数: 0引用数: 0
h-index: 0
机构:
Ogam Technol, Jeonju 54882, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Song, Ho-Geun
Lee, Cheul-Ro
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Lee, Cheul-Ro
Lee, In-Hwan
论文数: 0引用数: 0
h-index: 0
机构:
Korea Univ, Dept Mat Sci & Engn, Seoul 02841, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Lee, In-Hwan
Yu, Yeon-Tae
论文数: 0引用数: 0
h-index: 0
机构:
Chonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
Chonbuk Natl Univ, Coll Engn, Res Ctr Adv Mat Dev, Jeonju 561756, South KoreaChonbuk Natl Univ, Coll Engn, Div Adv Mat Engn, Jeonju 561756, South Korea
机构:
Univ Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, IranUniv Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, Iran
Nikfarjam, Alireza
Hosseini, Seyedsina
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, IranUniv Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, Iran
Hosseini, Seyedsina
Salehifar, Nahideh
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, IranUniv Tehran, Fac New Sci & Technol, MEMS&NEMS Lab, POB 14395-1561, Tehran 33316196363, Iran
机构:
Karmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, IndiaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Patil, Vithoba L.
Vanalakar, Sharadrao A.
论文数: 0引用数: 0
h-index: 0
机构:
Karmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Chonnam Natl Univ, Dept Mat Sci & Engn, Gwangju 500757, South KoreaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Vanalakar, Sharadrao A.
Patil, Pramod S.
论文数: 0引用数: 0
h-index: 0
机构:
Shivaji Univ, Dept Phys, Kolhapur 416009, Maharashtra, IndiaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India
Patil, Pramod S.
Kim, Jin H.
论文数: 0引用数: 0
h-index: 0
机构:
Chonnam Natl Univ, Dept Mat Sci & Engn, Gwangju 500757, South KoreaKarmaveer Hire Arts Commerce Sci & Educ Coll, Dept Phys, Gargoti 416009, India