Texture control and interfacial structures of SrBi2Ta2O9 thin films on Pt

被引：56

作者：

Lee, JS ^{[1
]}

Kim, HH ^{[1
]}

Kwon, HJ ^{[1
]}

Jeong, YW ^{[1
]}

机构：

[1] LG Corp Inst Technol, Seocho Gu, Seoul 137724, South Korea

来源：

APPLIED PHYSICS LETTERS | 1998年 / 73卷 / 02期

关键词：

D O I：

10.1063/1.121744

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The influence of the Pt bottom electrode orientation on the growth of SrBi2Ta2O9 (SBT) films was elucidated in terms of the atomic matching at the SBT/Pt interfaces. A highly c-axis oriented SET film was grown on the Pt (001) plane since the SET (00l) plane conjugates well with the Pt (001) plane from a crystallographic point of view. Both the strong (105)(tet) and (110)(tet) SBT peaks were found in the x-ray diffraction profile when the SET film was grown on the Pt (111) surface. It was found that not a single SET plane can match with the whole Pt (111) plane due to the appreciably different atomic configurations. The cross-sectional transmission electron microscopy image revealed that the SBT/Pt interface was structurally stable after heat treatment at 750 degrees C. (C) 1998 American Institute of Physics.

引用

页码：166 / 168

页数：3

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