A compact, sample-in-atmospheric-pressure soft x-ray microscope developed at Pohang Light Source

被引：3
作者：
Lim, Jun [1 ,2 ]
Shin, Hyun-Joon [1 ,2 ]
Chae, Keun Hwa [3 ]
Hwang, Chan-Cuk [1 ]
Hwang, Han-Na [1 ]
Hong, Chung Ki [2 ]
机构：
[1] POSTECH, Pohang Accelerator Lab, Pohang 790784, South Korea
[2] POSTECH, Dept Phys, Pohang 790784, South Korea
[3] KIST, Mat Sci & Technol Res Div, Seoul 130791, South Korea
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2010年 / 81卷 / 06期
基金：
新加坡国家研究基金会;
关键词：
RESOLUTION; TOMOGRAPHY;
D O I：
10.1063/1.3432000
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A full-field transmission soft x-ray microscope (TXM) was developed at the Pohang Light Source. With a 2 mm diameter condenser zone plate and a 40 nm outermost-zone-width objective zone plate, the TXM's achieved spatial resolution is better than 50 nm at the photon energy of 500 eV (wavelength: 2.49 nm). The TXM is portable and mounted in tandem with a 7B1 spectroscopy end station. The sample position is outside the vacuum, allowing for quick sample changes and enhanced in situ experimental capability. In addition, the TXM is pinhole-free and easy to align, having commercial mounts located outside the vacuum components. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3432000]
引用
收藏
页数：3
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