Ultrashort Pulse Processing of Transparent Ceramics: The Role of Electronic and Thermal Damage Mechanisms

被引:3
作者
Kalupka, Christian [1 ]
Schmalstieg, Martin [2 ]
Reininghaus, Martin [1 ]
机构
[1] Fraunhofer Inst Laser Technol ILT, Steinbachstr 15, D-52074 Aachen, Germany
[2] Rhein Westfal TH Aachen, Chair Laser Technol LLT, Steinbachstr 15, D-52074 Aachen, Germany
来源
JOURNAL OF LASER MICRO NANOENGINEERING | 2018年 / 13卷 / 02期
关键词
ultrashort laser pulses; processing; dielectrics; ceramics; spinel; ablation mechanisms; LASER; BREAKDOWN; DIELECTRICS; NANOSECOND; GLASS;
D O I
10.2961/jlmn.2018.02.0012
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study, we investigate the ultrashort pulse processing of the transparent, so-called, spinel ceramic (MgAl2O4). We examine the dominant underlying damage mechanisms by an adjustment of the processing parameters. The applied pulse duration is varied from 2 ps to 80 fs to investigate the impact of the electronic and thermal damage mechanisms on the observed modifications in the material. For surface structuring or ablation cutting conditions, pulse repetition rates below 1 MHz are used leading to electronic damages in form of micro-cracks and spikes inside the volume for pulse durations from 1 ps to 2 ps. By a decrease of the pulse duration to 80 fs, we are able to reduce the electronic damages due to a higher absorption of the laser pulse energy at the spinel surface. By an increase of the pulse repetition rate to 2 MHz, we find evidence for thermal melting of the spinel surface due to the impact of heat accumulation, which leads to a loss of the unique structural properties of the spinel.
引用
收藏
页码:126 / 130
页数:5
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