Spectroscopic investigations of pulsed microwave generated Ar, N2 and silane plasmas

被引：5

作者：

Krüger, J ^{[1
]}

Kubach, T ^{[1
]}

Feichtinger, J ^{[1
]}

Hirsch, K ^{[1
]}

Lindner, P ^{[1
]}

Quell, S ^{[1
]}

Schulz, A ^{[1
]}

Stirn, R ^{[1
]}

Walker, M ^{[1
]}

Schumacher, U ^{[1
]}

机构：

[1] Univ Stuttgart, Inst Plasmaforsch, D-70569 Stuttgart, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 174卷

关键词：

pulsed microwave plasma; silicon; argon; nitrogen; optical spectroscopy; Langmuir probe;

D O I：

10.1016/S0257-8972(03)00446-8

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The Plasmodul (Proc. ISPC 15, Orleans, V (2001) 1853), an array of four parallel coaxial microwave guides is used as source for (square wave) pulsed plasmas in argon, nitrogen and silane at pressures of 5-50 Pa. The plasma is homogeneously extended over an area of 12 by 12 cm(2). The temporal and radial behaviour of the electron temperature T-e(r, t), the electron density n(e)(r, t) and the densities of several molecules, atoms and ions are investigated with different diagnostic tools. The data are compared and discussed for the three different plasma gases. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：933 / 937

页数：5

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