Modelling and analysis of multiple cluster tools system with random failures using coloured Petri net

被引：5

作者：

Aized, Tauseef ^{[1
]}

机构：

[1] Univ Engn & Technol, Dept Mech Mechatron & Mfg Engn, Lahore, Pakistan

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2010年 / 50卷 / 9-12期

关键词：

Multiple cluster tool system; Modelling; Random failure; Coloured Petri net; STEADY-STATE THROUGHPUT; PERFORMANCE ANALYSIS; SCHEDULING ANALYSIS; SCHEDULABILITY; CONFIGURATION;

D O I：

10.1007/s00170-010-2592-8

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Semiconductor manufacturing is among the most complicated and expensive operation systems encountered today and multiple cluster tool system has become an important technology in semiconductor manufacturing systems with the advantages of higher yields and shorter cycle times. Modelling and simulation has become a standard methodology in order to understand and predict performance of semiconductor manufacturing systems. Resources random failures during process execution are one major concern regarding system performance measured in terms of throughput and cycle time. This study aims to models and analyse random failures of processing modules of multiple cluster tool systems using coloured Petri net method. The impact of different input factors on system throughput and cycle time is presented.

引用

页码：897 / 906

页数：10

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