Enhanced Energy Resolution of GaN-on-Sapphire p-i-n Alpha-Particle Detector With Isoelectronic Al-Doped i-GaN Layer

被引:12
作者
Geng, Xinlei [1 ]
Xia, Xiaochuan [1 ]
Cui, Xingzhu [2 ]
Huang, Huishi [3 ]
Liang, Xiaohua [2 ]
Yan, Dawei [4 ]
Tian, Kuikui [4 ]
Chen, Leilei [4 ]
Yan, Xiaohong [3 ]
Long, Ze [1 ]
Niu, Mengchen [1 ]
Meng, Xiangcheng [2 ]
Liang, Hongwei [1 ]
机构
[1] Dalian Univ Technol, Sch Microelect, Dalian 116024, Peoples R China
[2] Chinese Acad Sci, Inst High Energy Phys, Beijing 100049, Peoples R China
[3] Jiangsu Xinguanglian Technol Co Ltd, Wuxi 214192, Jiangsu, Peoples R China
[4] Jiangnan Univ, Engn Res Ctr IOT Technol Applicat, Minist Educ, Wuxi 214122, Jiangsu, Peoples R China
基金
美国国家科学基金会;
关键词
Detectors; Leakage currents; Fasteners; Gallium nitride; Substrates; PIN photodiodes; Etching; Energy resolution; gallium nitride; isoelectronic doping; particle detector; p-i-n; DISLOCATIONS; PERFORMANCE; IMPURITIES; SCHOTTKY; LEAKAGE;
D O I
10.1109/TNS.2021.3097085
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A GaN alpha-particle detector of p-i-n structure was fabricated on a sapphire substrate in this article. The intrinsic layer of the detector was isoelectronic Al-doped GaN with the thickness of 10 mu m. The leakage current of the detector remained below 10 pA when the reverse voltage increased from 0 to 40 V, which proved that it had a better crystal quality than the detector based on undoped i-GaN layer, of which the dark current was 10 nA at -40 V. The carrier concentration derived from the 1/C-2-V curve was 4.96 x 10(14) cm(-3), so the i-GaN layer would be fully depleted at -48 V. With the remarkable improvement of electrical properties, the charge collection efficiency (CCE) of the full depleted detector in this article was as high as 99%, while the energy resolution was about 4%. These results reveal the excellent prospect of GaN-on-sapphire for cost-effective alpha-particle detectors.
引用
收藏
页码:2301 / 2308
页数:8
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