3-D micro coaxial transmission lines with integrated MEM capacitors

被引：7
|
作者：
Natarajan, Saravana P. [1 ]
Weller, Thomas M. [1 ]
Hoff, Andrew M. [1 ]
机构：
[1] Univ S Florida, Dept Elect Engn, Ctr Wireless & Microwave Informat Syst, Tampa, FL 33620 USA
来源：
IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS | 2007年 / 17卷 / 12期
关键词：
micro coax capacitor; micro electromechanical (MEM) capacitor; rectangular coax; variable capacitor;
D O I：
10.1109/LMWC.2007.910487
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper introduces a 20 pm-tall, rectangular micro coaxial transmission line with an embedded micro electromechanical (MEM) capacitor. The measured capacitance ratio is about 6.5 with an actuation voltage of 30-50 V. To the best of the authors' knowledge, this is the first time a MEM device has been implemented within a fully-shielded, micro coaxial transmission line structure. The fabrication includes a single step release process for a dual layer suspended structure (beam and the top lid).
引用
收藏
页码：858 / 860
页数：3
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