Advances in research and applications of optical aspheric surface metrology

被引:23
作者
Liang Zi-jian [1 ]
Yang, Yong-ying [1 ]
Zhao, Hong-yang [1 ]
Liu, Sheng-an [1 ]
机构
[1] Zhejiang Univ, State Key Lab Modern Opt Instrumentat, Hangzhou 310027, Peoples R China
来源
CHINESE OPTICS | 2022年 / 15卷 / 02期
基金
中国国家自然科学基金;
关键词
aspheric surface testing; free-form surface testing; interferometry; null testing; non-null testing; SPATIAL LIGHT-MODULATOR; SUBAPERTURE STITCHING INTERFEROMETRY; COMPUTER-GENERATED HOLOGRAMS; FREE-FORM SURFACES; FREEFORM SURFACE; NULL LENS; SYSTEM; CALIBRATION; MIRROR; DEFLECTOMETRY;
D O I
10.37188/CO.2021-0143
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Optical Systems using aspheric components (especially for free-form ones) have remarkable advantages over traditional spherical systems in that they can satisfy complicated requirements with simple optical-mechanical structures relying on abundant optional design parameters. Surface testing is an essential process for ensuring accuracy in manufacturing. Therefore, plenty of testing methods have been developed to meet varying testing demands of different types of surfaces at different stages in manufacturing. This paper summarizes the history of aspheric surface testing technology, classifies available techniques by whether they use interferometry, then introduces corresponding technical indexes, applicable conditions, research progress and applications. This paper highlights the high-precision interferometric methods, basic principles, optical layout and testing performances of every measurement method classified into Null and Non-null testing. The pros and cons of each method are compared, relative algorithms are introduced and precise adjustment methods are discussed.
引用
收藏
页码:161 / 186
页数:27
相关论文
共 124 条
  • [81] Practical retrace error correction in non-null aspheric testing: A comparison
    Shi, Tu
    Liu, Dong
    Zhou, Yuhao
    Yan, Tianliang
    Yang, Yongying
    Zhang, Lei
    Bai, Jian
    Shen, Yibing
    Miao, Liang
    Huang, Wei
    [J]. OPTICS COMMUNICATIONS, 2017, 383 : 378 - 385
  • [82] SHU CH L, 2008, MODERN OPTICS MANUFA
  • [83] Aspheric and freeform surfaces metrology with software configurable optical test system: a computerized reverse Hartmann test
    Su, Peng
    Khreishi, Manal A. H.
    Su, Tianquan
    Huang, Run
    Dominguez, Margaret Z.
    Maldonado, Alejandro
    Butel, Guillaume
    Wang, Yuhao
    Parks, Robert E.
    Burge, James H.
    [J]. OPTICAL ENGINEERING, 2014, 53 (03)
  • [84] Optical testing for meter size aspheric optics
    Su, Peng
    Oh, Chang Jin
    Zhao, Chunyu
    Burge, James H.
    [J]. INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING, OPTICS, AND SEMICONDUCTORS VI, 2012, 8466
  • [85] Swing-arm optical coordinate measuring machine: modal estimation of systematic errors from dual probe shear measurements
    Su, Peng
    Parks, Robert E.
    Wang, Yuhao
    Oh, Chang Jin
    Burge, James H.
    [J]. OPTICAL ENGINEERING, 2012, 51 (04)
  • [86] Swing arm optical CMM: self calibration with dual probe shear test
    Su, Peng
    Wang, Yuhao
    Oh, Chang Jin
    Parks, Robert E.
    Burge, James H.
    [J]. OPTICAL MANUFACTURING AND TESTING IX, 2011, 8126
  • [87] Software configurable optical test system: a computerized reverse Hartmann test
    Su, Peng
    Parks, Robert E.
    Wang, Lirong
    Angel, Roger P.
    Burge, James H.
    [J]. APPLIED OPTICS, 2010, 49 (23) : 4404 - 4412
  • [88] Design of partial nulls for testing of fast aspheric surfaces
    Sullivan, John J.
    Greivenkamp, John E.
    [J]. OPTICAL MANUFACTURING AND TESTING VII, 2007, 6671
  • [89] Computer-Generated Hologram Fabricated by Electron-Beam Lithography for Noise Reduction
    Tamura, Hitoshi
    Ishii, Yukihiro
    [J]. OPTICAL REVIEW, 2012, 19 (02) : 50 - 57
  • [90] 3D shape measurement of the aspheric mirror by advanced phase measuring deflectometry
    Tang, Yan
    Su, Xianyu
    Liu, Yuankun
    Jing, Hailong
    [J]. OPTICS EXPRESS, 2008, 16 (19) : 15090 - 15096