Atomically resolved imaging by low-temperature frequency-modulation atomic force microscopy using a quartz length-extension resonator

被引:33
作者
An, Toshu [1 ,2 ]
Nishio, Takahiro [1 ]
Eguchi, Toyoaki [1 ]
Ono, Masanori [1 ]
Nomura, Atsushi [1 ]
Akiyama, Kotone [1 ,2 ]
Hasegawa, Yukio [1 ,2 ]
机构
[1] Univ Tokyo, Inst Solid State Phys, Kashiwa, Chiba 2778581, Japan
[2] Japan Sci & Technol Agcy, Chiyoda Ku, PRESTO, Tokyo 1020075, Japan
关键词
D O I
10.1063/1.2830937
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Low-temperature ultrahigh vacuum frequency-modulation atomic force microscopy (AFM) was performed using a 1 MHz length-extension type of quartz resonator as a force sensor. Taking advantage of the high stiffness of the resonator, the AFM was operated with an oscillation amplitude smaller than 100 pm, which is favorable for high spatial resolution, without snapping an AFM tip onto a sample surface. Atomically resolved imaging of the adatom structure on the Si (111)-(7 x 7) surface was successfully obtained. (C) 2008 American Institute of Physics.
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页数:6
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