IR spectroscopy of diamondlike silicon-carbon films

被引:3
|
作者
Gorshunov, B. P. [1 ]
Shupegin, M. L. [1 ]
Ivanov, V. Yu. [1 ]
Prokhorov, A. S. [1 ]
Spektor, I. E. [1 ]
Volkov, A. A. [1 ]
机构
[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Ul Vavilova 38, Moscow 119991, Russia
关键词
77.84.Lf; 78.67.-n;
D O I
10.1134/S1063784208050186
中图分类号
O59 [应用物理学];
学科分类号
摘要
IR spectra of metal-containing diamondlike silicon-carbon films are taken for the first time. It is shown that the optical response from the subsystem of free charge carriers in chromium-containing films can be described in terms of a simple model that deals with carriers localized inside clusters several nanometers in size. The data obtained indicate that the electric and dielectric properties of the films can be controlled by technological means during their synthesis and by varying the size, concentration, and conductivity of metallic nanoclusters.
引用
收藏
页码:641 / 645
页数:5
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