Theoretical rate constants for the reaction BF2+NF=BF3+N of importance in boron nitride chemistry

被引:17
作者
Ramalho, SS
Vilela, AFA
Barreto, PRP
Gargano, R
机构
[1] Univ Brasilia, Inst Fis, BR-70919970 Brasilia, DF, Brazil
[2] Inst Nacl Pesquisas Espaciais, MCT, Lab Associado Plasma, BR-12247970 Sao Jose Dos Campos, Brazil
关键词
D O I
10.1016/j.cplett.2005.07.041
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
A kinetic mechanism was developed for the growth of boron nitride films, including up to 35 species and 1012 gas-phase reactions. For 117 elementary reactions, rate constants are available from published experimental/theoretical data and a code was written to estimate the others using transition state theory. As an example of our approach, we report here results for one of these reactions, BF2 + NF = BF3 + N of presumable importance for the mechanism, using geometries and electronic energies (including their first and second derivatives), calculated ab initio along the minimum energy path. The reaction proceeds in two steps and rate constants were calculated for the temperature range 200-4000 K. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:151 / 156
页数:6
相关论文
共 34 条
[1]   A quantum chemical and classical transition state theory explanation of negative activation energies in OH addition to substituted ethenes [J].
Alvarez-Idaboy, JR ;
Mora-Diez, N ;
Vivier-Bunge, A .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2000, 122 (15) :3715-3720
[2]   PREPARATION, PROPERTIES AND APPLICATIONS OF BORON-NITRIDE THIN-FILMS [J].
ARYA, SPS ;
DAMICO, A .
THIN SOLID FILMS, 1988, 157 (02) :267-282
[3]   Recent developments in hard materials [J].
Badzian, A ;
Badzian, T .
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 1997, 15 (1-3) :3-12
[4]  
BARRETO P, 2000, 2000 INT C PLASM PHY, V3, P904
[5]   Theoretical study of the reactions BF3+BX, where X = H or N [J].
Barreto, PRP ;
Vilela, AFA ;
Gargano, R .
INTERNATIONAL JOURNAL OF QUANTUM CHEMISTRY, 2005, 103 (05) :685-694
[6]   A simple program to determine the reaction rate and thermodynamic properties of reacting system [J].
Barreto, PRP ;
Vilela, AFA ;
Gargano, R .
JOURNAL OF MOLECULAR STRUCTURE-THEOCHEM, 2003, 639 :167-176
[7]  
BARRETO PRP, 2002, INPE8701PRP227
[8]  
BARRETO PRP, 2002, SURFACE ENG 2002 SYN
[9]   Near-edge X-ray absorption fine structure spectroscopy of arcjet-deposited cubic boron nitride [J].
Berns, DH ;
Cappelli, MA ;
Shuh, DK .
DIAMOND AND RELATED MATERIALS, 1997, 6 (12) :1883-1886
[10]   ELECTRONIC-STRUCTURE OF THE RADICALS-NF AND NCL .1. POTENTIAL-ENERGY CURVES FOR NF [J].
BETTENDORFF, M ;
PEYERIMHOFF, SD .
CHEMICAL PHYSICS, 1985, 99 (01) :55-72