Energy harvesting properties of all-thin-film multiferroic cantilevers

被引：93
作者：
Onuta, Tiberiu-Dan [1 ]
Wang, Yi [2 ]
Long, Christian J. [2 ]
Takeuchi, Ichiro [1 ]
机构：
[1] Univ Maryland, Dept Mat Sci & Engn, College Pk, MD 20742 USA
[2] Univ Maryland, Dept Phys, College Pk, MD 20742 USA
来源：
APPLIED PHYSICS LETTERS | 2011年 / 99卷 / 20期
关键词：
WIRELESS;
D O I：
10.1063/1.3662037
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have measured electromagnetic energy harvesting properties of all-thin-film magnetoelectric (ME) heterostructures on Si cantilevers. The devices are built on a silicon oxide/nitride/oxide stack, and the ME layers consist of a magnetostrictive Fe(0.7)Ga(0.3) thin film and a Pb(Zr(0.52)Ti(0.48))O(3) piezoelectric thin film. The harvested peak power at 1Oe is 0.7 mW/cm(3) (RMS) at the resonant frequency (3.8 kHz) with a load of 12.5 k Omega. The resonant frequency was found to display DC bias magnetic field dependence indicative of a magnetization canting with respect to the cantilever easy axis as a result of interplay between the anisotropy and Zeeman energies. (C) 2011 American Institute of Physics. [doi:10.1063/1.3662037]
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页数：3
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