Microwave characterization of a novel, environmentally friendly, plasma polymerized organic thin film

被引：7

作者：

Anderson, L. ^{[1
]}

Jacob, M. ^{[1
]}

机构：

[1] James Cook Univ, Sch Engn & Phys Sci, Elect Mat Res Lab, Townsville, Qld 4811, Australia

来源：

9TH INTERNATIONAL CONFERENCE ON NANO-MOLECULAR ELECTRONICS | 2011年 / 14卷

关键词：

Split Post Dielectric Resonator; High Frequency; Dielectric Constant; MIM; TIME-DOMAIN MEASUREMENT; PERMITTIVITY;

D O I：

10.1016/j.phpro.2011.05.017

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Polymerized Linalyl Acetate (PLA) thin films were fabricated using RF plasma polymerization. The dielectric properties of the PLA thin films have been investigated using the split post dielectric resonance technique, which consists of a silver coated copper cavity and two precisely machined identical dielectric materials. The measurements have been carried out at resonance frequencies of 10 GHz and 20 GHz, with good agreement between results. The dielectric properties were also investigated at low frequencies using capacitive measurements of MIM structures. All methodologies place the dielectric constant of the PLA material at approximately 2.4, indicating the material is suitable for use in electronics as an insulating layer. (C) 2010 Published by Elsevier B.V.

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