Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

被引：19

作者：

Abrutis, A

Bartasyte, A

Garcia, G

Teiserskis, A

Kubilius, V

Saltyte, Z

Faucheux, V

Figueras, A

Rushworth, S

机构：

[1] Vilnius State Univ, Dept Gen & Inorgan Chem, LT-2006 Vilnius, Lithuania

[2] ICMAB, CSIC, Bellaterra 08193, Barcelona, Spain

[3] INPG, UMR CNRS 5628, ENS Phys Grenoble, LMGP, St Martin Dheres, France

[4] Epichem Ltd, Wirral CH62 3QF, Merseyside, England

[5] Univ Nacl Autonoma Mexico, Ctr Fis Aplicada & Technol Avanzada, Santiago de Queretaro 76000, QRO, Mexico

来源：

THIN SOLID FILMS | 2004年 / 449卷 / 1-2期

关键词：

oxides; coatings; deposition process; chemical vapor deposition (CVD);

D O I：

10.1016/S0040-6090(03)01404-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Perovskite oxide layers, i.e. manganites La(1-x)(Sr,Ca)(x)MnO(3), ferrates La(1-x)Sr(x)Fe(1-y)Co(y)O(3), gallates La(1-x)Sr(x)Ga(1-y)(Co, Ni,Fe)(y)O(3) of a thickness of 0.8-2 mum, were deposited by pulsed injection MOCVD (metal-organic chemical vapour deposition) on various monocrystalline and porous ceramic substrates. The layers were characterised by X-ray diffraction, scanning electron microscopy, wavelength dispersion spectroscopy and by electrical measurements of the total conductivity vs. temperature. Such oxides are known as mixed electronic-ionic conductors and are largely studied as materials for the fabrication of oxyg en permeable membranes. One of the aims of this work was to estimate the suitability of the pulsed injection MOCVD technique for the preparation of dense perovskite layers for their use as membranes for oxygen. (C) 2003 Elsevier B.V. All rights reserved.

引用

页码：94 / 99

页数：6

共 17 条

[1] Magnetoresistant La1-xSrxMnO3 films by pulsed injection metal organic chemical vapor deposition:: effect of deposition conditions, substrate material and film thickness [J].