Electro-Mechano-Fluidic Modeling of Microsystems Using Finite Elements

被引：3

作者：

Rochus, V. ^{[3
]}

Gutschmidt, S. ^{[4
]}

Cardona, A. ^{[2
]}

Geuzaine, C. ^{[1
]}

机构：

[1] Univ Liege, Dept Elect Engn & Comp Sci ACE, B-4000 Liege, Belgium

[2] CIMEC INTEC UNL CONICET, UNL, RA-3000 Santa Fe, Argentina

[3] IMEC, B-3001 Louvain, Belgium

[4] Univ Canterbury, Dept Mech Engn, Christchurch 1, New Zealand

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2012年 / 48卷 / 02期

关键词：

Electromagnetic forces; electromechanical sensors; finite element methods; nonlinear dynamical systems; scientific computing; MICROSTRUCTURES; MEMS; FILM;

D O I：

10.1109/TMAG.2011.2173663

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Strong couplings between the mechanical, electric, magnetic, fluidic and thermal fields exist in the behaviour laws describing microsystems. Also, due to the large surface/volume ratio, surface forces such as the electrostatic force and fluid damping become predominant. This paper presents the modeling and simulation of electrically-actuated micro-systems taking the electro-mechano-fluidic coupling into account. A micro-resonator consisting in a cantilever beam suspended over a substrate is modeled, and finite-element simulations are validated with experimental measurements.

引用

页码：355 / 358

页数：4

共 15 条

[1] Squeeze film air damping in MEMS [J].