The little machines that are making it big

被引:30
作者
Bishop, D [1 ]
Gammel, P
Giles, CR
机构
[1] Lucent Technol, Bell Labs, Photon Subsyst Res Dept, Murray Hill, NJ 07974 USA
[2] Agere Syst, Opto Electro Mech Integrat Res Dept, Murray Hill, NJ USA
关键词
D O I
10.1063/1.1420552
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The importance and applications of Microelectromechanical systems (MEMS) is presented with stress on micromechanics. MEMS used in a variety of applications like triggering airbags and measuring the Casimir force. Lithographic processes, photoresists, silicon wafers, reliability methodologies are used in making MEMS devices. MEMS devices are the key components of smart tires which were inflated at all times. Other MEMS opplications in automobiles include inertial sensors to keep track of car's location, tilt meters to warn roll-overs, and pressure guages to assure efficient operation. The world wide market for MEMS is estimated to exceed tens of billion of dollars in the next several years.
引用
收藏
页码:38 / 44
页数:7
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