New understanding of LDD CMOS hot-carrier degradation and device lifetime at cryogenic temperatures

被引:13
|
作者
WangRatkovic, J
Lacoe, RC
MacWilliams, KP
Song, M
Brown, S
Yabiku, G
机构
关键词
D O I
10.1109/RELPHY.1997.584280
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work shows that the worst-case gate voltage stress condition for LDD nMOSFETs is a strong function of the channel length, drain voltage, and operating temperature. A nevi cross-over behavior of the worst-case gate voltage condition is reported at low temperatures. New understanding of the hot-carrier mechanisms at low temperatures is also discussed Low temperature effects such as freeze-out are shown to have important contributions to the hot-carrier behavior at low temperatures. A trend is identified for the first. time which suggests important consequences for the hot-carrier reliability of deep sub-micron channel length MOSFETs under normal operating temperatures.
引用
收藏
页码:312 / 319
页数:8
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