Design and Fabrication of a PDMS/Parylene Microvalve for the Treatment of Hydrocephalus

被引：28

作者：

Oh, Jonghyun ^{[1
]}

Kim, Gyuman ^{[2
]}

Kralick, Francis ^{[3
]}

Noh, Hongseok ^{[1
]}

机构：

[1] Drexel Univ, Mech Engn & Mech Dept, Philadelphia, PA 19104 USA

[2] Kyungpook Natl Univ, Sch Mech Engn, Taegu 702701, South Korea

[3] Drexel Univ, Dept Neurosurg, Coll Med, Philadelphia, PA 19102 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2011年 / 20卷 / 04期

基金：

美国国家科学基金会;

关键词：

Excimer laser machining; hydrocephalus; implantable microdevice; microvalve; Parylene; polydimethylsiloxane (PDMS); ARRAY; SHUNT;

D O I：

10.1109/JMEMS.2011.2148158

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel microvalve for the treatment of a pathological condition, i.e., hydrocephalus. This microvalve is made of polydimethylsiloxane/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to rectify fluid flow in the forward and backward directions. New microfabrication techniques such as dome-shaped SU-8 mold fabrication and excimer laser machining for valve opening have been investigated to build the proposed microvalve. The pressure drop versus flow rate characteristics of the fabricated microvalve was investigated through in vitro flow tests. The flow test results showed that a 10 x 10 microvalve array with a cross-cut opening shape (200 mu m x 60 mu m) was found to be optimal for the treatment of hydrocephalus.

引用

页码：811 / 818

页数：8

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