High-Sensitivity Fabry-Perot Interferometric Acoustic Sensor for Low-Frequency Acoustic Pressure Detections

被引：120

作者：

Gong, Zhenfeng ^{[1
]}

Chen, Ke ^{[1
]}

Zhou, Xinlei ^{[1
]}

Yang, Yang ^{[1
]}

Zhao, Zhihao ^{[1
]}

Zou, Helin ^{[2
]}

Yu, Qingxu ^{[1
]}

机构：

[1] Dalian Univ Technol, Coll Phys & Optoelect Engn, Dalian 116023, Peoples R China

[2] Dalian Univ Technol, Coll Mech Engn, Dalian 116023, Peoples R China

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 2017年 / 35卷 / 24期

关键词：

Acoustic pressure detection; Fabry-Perot; fiber optics sensors; SILVER DIAPHRAGM; FIBER;

D O I：

10.1109/JLT.2017.2761778

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 mu Pa/Hz(1/2) at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.

引用

页码：5276 / 5279

页数：4

共 16 条

[1] High performance chitosan diaphragm-based fiber-optic acoustic sensor [J].

Chen, L. H. ;

Chan, C. C. ;

Yuan, W. ;

Goh, S. K. ;

Sun, J. .

SENSORS AND ACTUATORS A-PHYSICAL, 2010, 163 (01) :42-47

[2] Silk fibroin diaphragm-based fiber-tip Fabry-Perot pressure sensor [J].

Cheng, Linghao ;

Wang, Cengzhong ;

Huang, Yunyun ;

Liang, Hao ;

Guan, Bai-Ou .

OPTICS EXPRESS, 2016, 24 (17) :19600-19606

[3]

Di Giovanni M., 1982, FLAT CORRUGATED DIAP

[4] High-sensitivity, high-frequency extrinsic Fabry-Perot interferometric fiber-tip sensor based on a thin silver diaphragm [J].

Guo, Fawen ;

Fink, Tom ;

Han, Ming ;

Koester, Lucas ;

Turner, Joseph ;

Huang, Jinsong .

OPTICS LETTERS, 2012, 37 (09) :1505-1507

[5] Overview of high performance fibre-optic sensing [J].

Kirkendall, CK ;

Dandridge, A .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2004, 37 (18) :R197-R216

[6] Analyzing the applicability of miniature ultra-high sensitivity Fabry-Perot acoustic sensor using a nanothick graphene diaphragm [J].

Li, Cheng ;

Gao, Xiangyang ;

Guo, Tingting ;

Xiao, Jun ;

Fan, Shangchun ;

Jin, Wei .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2015, 26 (08)

[7] Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragm [J].

Liu, Bin ;

Lin, Jie ;

Liu, Huan ;

Jin, An ;

Jin, Peng .

MICROELECTRONIC ENGINEERING, 2016, 166 :50-54

[8] Optics Temperature-Dependent Nonuniformity Correction Via l0-Regularized Prior for Airborne Infrared Imaging Systems [J].

Liu, Li ;

Zhang, Tianxu .

IEEE PHOTONICS JOURNAL, 2016, 8 (05)

[9] Stabilizing operation point technique based on the tunable distributed feedback laser for interferometric sensors [J].

Mao, Xuefeng ;

Zhou, Xinlei ;

Yu, Qingxu .

OPTICS COMMUNICATIONS, 2016, 361 :17-20

[10]

Noh H. S., 2014, SENSOR ACTUAT B-CHEM, V102, P78

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