Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step

被引：18

作者：

Carpenter, L. G. ^{[1
]}

Berry, S. A. ^{[1
]}

Gawith, C. B. E. ^{[1
]}

机构：

[1] Univ Southampton, Optoelect Res Ctr, Southampton, Hants, England

来源：

ELECTRONICS LETTERS | 2017年 / 53卷 / 25期

基金：

英国工程与自然科学研究理事会;

关键词：

GREEN-LIGHT GENERATION;

D O I：

10.1049/el.2017.2863

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO3) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is comparable with surface roughnesses achieved by lapping and polishing and represents an order of magnitude improvement over the prior state of the art in LiNbO3 waveguide facet dicing.

引用

页码：1672 / 1673

页数：2

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