Tailored probes for atomic force microscopy fabricated by two-photon polymerization

被引：32

作者：

Goering, Gerald ^{[1
]}

Dietrich, Philipp-Immanuel ^{[2
,3
]}

Blaicher, Matthias ^{[2
,3
]}

Sharma, Swati ^{[2
]}

Korvink, Jan G. ^{[2
]}

Schimmel, Thomas ^{[1
,4
]}

Koos, Christian ^{[2
,3
]}

Hoelscher, Hendrik ^{[2
]}

机构：

[1] Karlsruhe Inst Technol, Inst Nanotechnol INT, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

[2] Karlsruhe Inst Technol, IMT, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany

[3] Karlsruhe Inst Technol, Inst Photon & Quantum Elect IPQ, Engesserstr 5, D-76131 Karlsruhe, Germany

[4] Karlsruhe Inst Technol, Inst Appl Phys APH, Wolfgang Gaede Str 1, D-76131 Karlsruhe, Germany

来源：

APPLIED PHYSICS LETTERS | 2016年 / 109卷 / 06期

基金：

欧洲研究理事会;

关键词：

TIPS;

D O I：

10.1063/1.4960386

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

3D direct laser writing based on two-photon polymerization is considered as a tool to fabricate tailored probes for atomic force microscopy. Tips with radii of 25 nm and arbitrary shape are attached to conventionally shaped micro-machined cantilevers. Long-term scanning measurements reveal low wear rates and demonstrate the reliability of such tips. Furthermore, we show that the resonance spectrum of the probe can be tuned for multi-frequency applications by adding rebar structures to the cantilever. Published by AIP Publishing.

引用

页数：5

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