An Ohmic Contact Type RF-MEMS Switch Having Au-Au/CNTs Contacts

被引：0

作者：

Kageyama, Tomoaki ^{[1
]}

Shinozaki, Koichi ^{[2
]}

Zhang, Lan ^{[3
]}

Lu, Jian ^{[3
]}

Takaki, Hideki ^{[3
]}

Lee, Sang-Seok ^{[1
]}

机构：

[1] Tottori Univ, Grad Sch Engn, Tottori, Japan

[2] Japan Aerosp Explorat Agcy JAXA, Tsukuba, Ibaraki, Japan

[3] AIST, Res Ctr Ubiquitous MEMS & Microengn, Tsukuba, Ibaraki, Japan

来源：

2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2017年

关键词：

RF-MEMS switch; Ohmic contact; CNT; reliability;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we report the fabrication results of an ohmic contact type RF-MEMS switch having Au-Au/CNTs contacts. The Au-Au/CNTs contacts have been proposed to improve the reliability and the high power handling capability of the ohmic contact type RF-MEMS switches. In the fabrication, we applied Au/CNTs composite electroplated film to the contact area in the signal line whereas the Au electroplating was used to form contacts under the cantilever of the switch. As a result, we achieved low insertion loss less than 0.7 dB up to 40 GHz and 2.7 times longer life time than that of Au-Au contacts switch.

引用

页码：287 / 290

页数：4

共 5 条

[1] Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of 'friction polymer' on the contacts [J].