Selective etching of spin-coated and thermally evaporated As30S45Se25 thin films

被引：17
作者：
Palka, K. [1 ,2 ]
Slang, S. [2 ]
Buzek, J. [1 ]
Vlcek, M. [2 ]
机构：
[1] Univ Pardubice, Fac Chem Technol, Dept Gen & Inorgan Chem, Pardubice 53210, Czech Republic
[2] Univ Pardubice, Fac Chem Technol, Ctr Mat & Nanotechnol, Pardubice 53210, Czech Republic
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 2016年 / 447卷
关键词：
Chalcogenide glasses; Selective etching; Thin films; AS-S-SE; OPTICAL-PROPERTIES; CHALCOGENIDE GLASS; RAMAN-SCATTERING; SYSTEM; DISSOLUTION; SELENIUM; SPECTRA; AMINES; LAYERS;
D O I：
10.1016/j.jnoncrysol.2016.05.042
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Chalcogenide glasses are intensively studied materials due to their interesting optical properties such as high values of refractive index, wide transparency in IR, photosensitivity, etc. We report on the comparison of photo and thermo-induced changes in optical properties and chemical resistance of thermally evaporated and spin coated As30S45Se25 thin films. Significantly different trends of photo-induced changes in chemical resistance in both types of thin films such as negative etching of thermally evaporated thin films and positive etching of spin-coated thin films were observed. The structural changes responsible for the observed phenomena were investigated as well. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码：104 / 109
页数：6
相关论文
共 35 条
[1]   Raman scattering in As-Se-S and As-Se-Te Chalcogenide vitreous semiconductors [J].
Alekberov, R. I. ;
Mekhtiyeva, S. I. ;
Isayeva, G. A. ;
Isayev, A. I. .
SEMICONDUCTORS, 2014, 48 (06) :800-803
[2]   Correlating structure with non- linear optical properties in xAs40Se60•(1-x)As40S60 glasses [J].
Barney, Emma R. ;
Abdel-Moneim, Nabil S. ;
Towey, James J. ;
Titman, Jeremy ;
McCarthy, John E. ;
Bookey, Henry T. ;
Kar, Ajoy ;
Furniss, David ;
Seddon, Angela B. .
PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 2015, 17 (09) :6314-6327
[3]  
Borisova Z.U., 1981, GLASSY SEMICONDUCTOR
[4]   Investigations of As-S-Se thin films for use as inorganic photoresist for digital image-matrix holography [J].
Bulanovs, Andrejs ;
Gerbreders, Vjacheslavs ;
Kirilovs, George ;
Teteris, Janis .
CENTRAL EUROPEAN JOURNAL OF PHYSICS, 2011, 9 (05) :1327-1333
[5]   Non-linear optical properties of chalcogenide glasses in the system As-S-Se [J].
Cardinal, T ;
Richardson, KA ;
Shim, H ;
Schulte, A ;
Beatty, R ;
Le Foulgoc, K ;
Meneghini, C ;
Viens, JF ;
Villeneuve, A .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1999, 256 :353-360
[6]  
Cernosek Z, 2009, J NON-OXIDE GLASSES, V1, P38
[7]  
Chem G. C., 1983, J APPL PHYS, V54, P4596
[8]   Structural features of spin-coated thin films of binary AsxS100-x chalcogenide glass system [J].
Cook, J. ;
Slang, S. ;
Golovchak, R. ;
Jain, H. ;
Vlcek, M. ;
Kovalskiy, A. .
THIN SOLID FILMS, 2015, 589 :642-648
[9]   RAMAN-SPECTRA OF SULFUR DISSOLVED IN PRIMARY AMINES [J].
DALY, FP ;
BROWN, CW .
JOURNAL OF PHYSICAL CHEMISTRY, 1973, 77 (15) :1859-1861
[10]   Structure and vibrational modes of As-S-Se glasses: Raman scattering and ab initio calculations [J].
Han, Xuecai ;
Tao, Haizheng ;
Pan, Ruikun ;
Lang, Yudong ;
Shang, Chunli ;
Xing, Xiaoming ;
Tu, Qianyue ;
Zhao, Xiujian .
XIII INTERNATIONAL CONFERENCE ON THE PHYSICS OF NON-CRYSTALLINE SOLIDS, 2013, 48 :59-64
1234